New Era of Semiconductor Manufacturing (Ⅲ) Breakthrough for Everlasting Prosperity of Semiconductor Industry--Proposal of very compact manufacturing system for 300 mm wafer from Tohoku University ULTRA CLEAN TECHNOLOGY Vol.10 Supplement 1, 1998
Title(Kana)
New Era of Semiconductor Manufacturing (Ⅲ) Breakthrough for Everlasting Prosperity of Semiconductor Industry--Proposal of very compact manufacturing system for 300 mm wafer from Tohoku University ULTRA CLEAN TECHNOLOGY Vol.10 Supplement 1, 1998
Author/Creator
UCS(Ultra Clean Society) Institute of Basic Semiconductor Technology Development
UCS(Ultra Clean Society) Institute of Basic Semiconductor Technology Development
Year
1998/99/99
Place of Publication
仙台市
Country of publication
日本国
Printed/ Manuscript
印刷資料
Material Type
雑誌
Form
紙／冊子
Language
英語
Description
Notes
[内容]
[種別]刊行物
[タイトルの記述レベル]書名
[現物の利用制限]全部公開
[現物利用申請書類]簡易利用申請書(Excel)｜http://www2.archives.tohoku.ac.jp/yoshiki/tokuteirekisi-kaniriyo.xls
Images
無
Call Number
工学／学会
Department
史料館
Collection
学内刊行物
学内刊行物
Record ID
12030000007432
管理用項目
Holder of Material
東北大学史料館
