New Era of Semiconductor Manufacturing　(Ⅲ) Breakthrough for Everlasting Prosperity of Semiconductor Industry--Proposal of very compact manufacturing system for 300 mm wafer from Tohoku University　ULTRA CLEAN TECHNOLOGY Vol.10 Supplement 1, 1998

Title(Kana)

Author/Creator

UCS(Ultra Clean Society)　Institute of Basic Semiconductor Technology Development

Year

1998/99/99

Place of Publication

仙台市

Country of publication

日本国

Printed/ Manuscript

印刷資料

Material Type

雑誌

Form

紙／冊子

Language

英語

Description

Notes

[内容]

[種別]刊行物

[タイトルの記述レベル]書名

[現物の利用制限]全部公開

[現物利用申請書類]

Images

無

Location

史料館閲覧室

Call Number

工学／学会

Record ID of the Department

SER2016-07445

Department

史料館

Collection

学内刊行物

Record ID

12030000007432

このページのURL

https://touda.tohoku.ac.jp/portal/item/12030000007432

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