12030000007432
New Era of Semiconductor Manufacturing (Ⅲ) Breakthrough for Everlasting Prosperity of Semiconductor Industry--Proposal of very compact manufacturing system for 300 mm wafer from Tohoku University ULTRA CLEAN TECHNOLOGY Vol.10 Supplement 1, 1998
Author/Creator
UCS(Ultra Clean Society) Institute of Basic Semiconductor Technology Development
UCS(Ultra Clean Society) Institute of Basic Semiconductor Technology Development
Year
1998/99/99
Place of Publication
仙台市
Country of publication
日本国
Printed/ Manuscript
印刷資料
Material Type
雑誌
Form
紙／冊子
Language
英語
Description
Notes
[内容]
[種別]刊行物
[タイトルの記述レベル]書名
[現物の利用制限]全部公開
[現物利用申請書類]簡易利用申請書(Excel)｜http://www2.archives.tohoku.ac.jp/yoshiki/tokuteirekisi-kaniriyo.xls
Images
無
Location
史料館閲覧室
Call Number
工学／学会
Record ID of the Department
SER2016-07445
Department
史料館
Record ID
12030000007432
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