New Era of Semiconductor Manufacturing (Ⅲ) Breakthrough for Everlasting Prosperity of Semiconductor Industry--Proposal of very compact manufacturing system for 300 mm wafer from Tohoku University ULTRA CLEAN TECHNOLOGY Vol.10 Supplement 1, 1998
UCS(Ultra Clean Society) Institute of Basic Semiconductor Technology Development 1998/99/99 雑誌
学内刊行物 学内刊行物
New Era of Semiconductor Manufacturing (Ⅳ) Breakthrough for Everlasting Prosperity of Semiconductor Industry
Institute of Basic Semiconductor Technology Development 2001/12/99 雑誌
学内刊行物 学内刊行物